Colloquium Date: Monday, March 05, 2007
A bi-weekly event to present and discuss issues related to developments, applications and commercialization of nanotechnology.
New nano-processing tools - extending the capabilities and opportunities in nanofabrication
Speakers: John W Burgoyne, Chris Hodson & Cigang Xu
(VIDEO CONFERENCED FROM OXFORD, UK)
Abstract: A wide range of processing techniques and
technologies are available for creating nano-structures and -materials.
However the focus is increasingly moving onto the need for tools and
processes which can not only operate at the nano-scale, but do so
repeatably and reproducibly, with a high degree of control and the
ability to engineer device structures. To meet these needs, Oxford
Instruments has brought new tools to the market, building on proven
reliability in semiconductor, photonic and MEMS applications, while
extending their capabilities into sub-100 nm features.
In this talk we will discuss three topic areas: new tools using
plasma-enhanced chemical vapour deposition (PECVD) for nanotube and
nanowire growth across CNT and Si, III-V and oxide nanowires; atomic
layer deposition (ALD) to enable the highly controllable and conformal
deposition of nanometer-thin films; and the development of new plasma
etch processes and chemistries for precise Si nano-features. The emphasis in each
of these areas is to meet the needs highlighted above with tools
suitable for both R&D and into production. We will describe the
technologies in each, and show the results in materials and structures.
Chris Hodson is an Applications Specialist on
deposition processes at Oxford Instruments. He has worked for 6 years
focusing on PECVD and more recently on Oxford Instruments' latest
deposition technology, ALD. Chris holds a degree in Applied Physics
from Durham University, UK.
Dr. Cigang Xu is a Development
Scientist currently focused on developing synthesis processes for carbon
nanotube and semiconducting nanowires. He obtained his PhD in Chemistry
from University of Oxford, UK specializing in synthesis and chemical
studies of single-walled carbon nanotubes (SWNTs), followed by postdoctoral
research on TiO2 nanoparticle-based dye-sensitised solid-state solar cells
at Imperial College London, UK and developing molecular interconnects for
nanotechnology using bottom-up strategy at University of Glasgow.
Dr John Burgoyne is a New Business Innovation Manager with
Oxford Instruments, responsible for exploring new market and technology
spaces for the company. His PhD and research background lie in high
temperature superconductors, and he has worked in a number of technical
and marketing positions in superconducting magnets, magnetic resonance
imaging (MRI) and materials process equipment. He gained an MBA with
distinction from the University of Warwick Business School, UK in 2006.
VENUE: You may attend the presentation from any
one of these law offices of Winstead PC or from UT Dallas
AUSTIN: Winstead PC
401 Congress Av., Ste 2100, Austin, TX 78701;
The University of Texas at Dallas,
The School of Management,
800 West Campbell Road, Room SOM1.502 map
Richardson, TX 75080; 972-883-4568
HOUSTON: Winstead PC
919 Milam, Ste 2400
Houston, TX 77002; 713-650-8400
SAN ANTONIO: Winstead PC
700 N. St Mary St., Ste 1900
San Antonio, TX 78205; 210-277-6800
THE WOODLANDS: Winstead PC
600 Town Center One, 1450 Lake Robbins Drive,
The Woodlands, TX 77380; 281-681-5900
Program begins at 11:30am with a complimentary lunch provided by Winstead PC.
Presentation begins at 12:00pm.
Richard Fink 512-339-5020x130 email@example.com
Max Roundhill 512-339-5020x120 firstname.lastname@example.org
Chairman: Dr. Zvi Yaniv
Registration deadline is Friday, March 2 at 5:00 PM Central.
To register, please send an email to Deepika Misra
email@example.com with your preferred attendance location.
Nanomaterials Applications Center
Walt Trybula, Ph.D.
Texas State University
San Marcos, TX
DVDs of selected presentations from previous
speakers are available for a small fee (contact
Max Roundhill firstname.lastname@example.org)
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